旭サナック株式会社旭サナック株式会社

PRODUCTS

Precision cleaning equipment

HPMJ® High pressure micro jet cleaning system

MJ series, Non-metal type

MJ 2800 MJ 2800T

MJ 2800

MJ 2800

MJ 2800T

MJ 2800T

FEATURE

・Designed for a semiconductor production line
・Random injection from each nozzle is possible

SPEC

Model MJ 2800 MJ 2800T
Regular maximum discharge pressure 12MPa 12MPa
Compatible cleaning liquid Pure water Pure water
External dimensions 380×450×1300mm 1200×500×1550mm
Weight 50kg 200kg
Power 100V~240V 200V
Maximum number of nozzles 1 pcs (31-612) at 10MPa 3 pcs (31-612) at 10MPa
Cleaning liquid spray volume 1.15 L/min (Spray volume at 10 MPa) 3.45l/min (Spray volume at 10 MPa)
Power Compressed air Compressed air

・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.

Pump system of MJ series can be modified to HSPJ system.

MJ series, compact type

MJH 1628 MJH1635 

MJ 2800

FEATURE

・Non-metallic specifications are also available, This pump can be installed in the existing cleaning line.

SPEC

Model MJH 1628 MJH 1635
Regular maximum discharge pressure 13MPa 9MPa
Compatible cleaning liquid Ultra pure water, chemicals Ultra pure water, chemicals
External dimensions 750×400×500mm 750×400×500mm
Weight 130kg 130kg
Power 200V (100V Option) 200V (100V Option)
Maximum number of nozzles 2 pcs (1.31 L/min at 13 MPa and per nozzle) 4 pcs (1.1 L/min at 9 MPa and per nozzle)
Cleaning liquid spray volume 2.62L/min (13 MPa spray volume× with 2 nozzles) 4.4 L/min (9 MPa spray volume× with 4 nozzles)
Power Compressed air Compressed air

・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.

Pump system of MJH series can be modified to HSPJ system.

AF series, Standard type

AF2800 AF5400S(C) AF6200S AF5400SW(C) AF6200SW

MJ 2800

AF2800

MJ 2800

AF5400S(C)
AF6200S

MJ 2800

AF5400SW(C)
AF6200SW

FEATURE

・1st - 4th generation compatibility.
・Random injection from each nozzle is possible

SPEC

Model AF 2800 AF 5400S(C) AF 6200S
Regular maximum discharge pressure 12MPa 15MPa 12MPa
Compatible cleaning liquid Pure water Ultra pure water, chemicals(liquid) Ultra pure water, chemicals(liquid)
External dimensions 380×450×1300mm 600×554×1800mm 600×554×1800mm
Weight 50kg 200kg 200kg
Power 100V~240V 200V (100V Option) 200V (100V Option)
Maximum number of nozzles 1 pcs (612 nozzle) at 10 MPa 4 pcc (612 nozzle) at 10 MPa 6 pcs (612 nozzle) at 10 MPa
Cleaning liquid spray volume 1.15 L/min (Spray volume at 10 MPa) 4.6L/min (Spray volume at 10 MPa) 6.9L/min (Spray volume at 10 MPa)
Power Compressed air Compressed air Compressed air
Model AF 5400SW(C) AF 6200SW
Regular maximum discharge pressure 15MPa 12MPa
Compatible cleaning liquid Ultra pure water, chemicals(liquid) Ultra pure water, chemicals(liquid)
External dimensions 1350×560×1850mm 1350×560×1850mm
Weight 450kg 450kg
Power 200V (100V Option) 200V (100V Option)
Maximum number of nozzles 8 pcs (612 nozzle) at 10 MPa 12 pcs (612 nozzle) at 10 MPa
Cleaning liquid spray volume 9.2L/min (Spray volume at 10 MPa) 14L/min (Spray volume at 10 MPa)
Power Compressed air Compressed air

・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.

AF series is also possible to install HSPJ.

MJE, MJT series

MJE 1520(C) MJE 2020(C) MJE 1570 MJE 2050 MJE3030
MJT 2020(C) MJT 2035(C) MJT 1570 MJT 2050

MJ 2800

Standard type

MJE 1520(C) MJE 2020(C)
MJT 2020(C) MJT 2035(C)

MJ 2800

High flow & volume type

MJE 1570 MJE 2050
MJT 1570 MJT 2050

MJ 2800

High impact type

MJE3030

FEATURE

Standard type, high flow & volume type

・ FPD: 4th - 11th generation compatibility, The optimum pressure and flow rate of pump unit can selected according to the glass substrate size. MJE type is made in Japan, Note: Manufactured according to Japanese quality standards.
・MJT type is made in Taiwan. (Cost benefits have also been added.)


High impact type

・Possible to clean at 30 MPa (maximum)

SPEC

MJE series

Model MJE1520(C) MJE2020(C) MJE1570
Regular maximum discharge pressure 15MPa 15MPa 15MPa
Compatible cleaning liquid Pure water Pure water Pure water
External dimensions 1600×620×1400mm 1600×620×1400mm 1700×900×1550mm
Weight 500kg 550kg 1000kg
Power 200V 5.5kW 200V 7.5kW 200V~240V 22kW
Maximum number of nozzles 14 pcs (612 nozzle) at 10 MPa 20 pcs (612 nozzle) at 10 MPa 60 pcs (612 nozzle) at 10 MPa
Cleaning liquid spray volume 16L/min (Spray volume at 10 MPa) (at 10 MPa spray volume× with 14 nozzles) 24L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 20 nozzles) 70L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 60 nozzles)
Power Inverter motor Inverter motor Inverter motor
Model MJE2050 MJE3030
Regular maximum discharge pressure 20MPa 30MPa
Compatible cleaning liquid Pure water Pure water
External dimensions 1700×900×1550mm 1700×900×1550mm
Weight 1000kg 1000kg
Power 200V~240V 22kW 200V~240V 22kW
Maximum number of nozzles 34 pcs (612 nozzle) at 15 MPa 14 pcs (612 nozzle) at 30 MPa
Cleaning liquid spray volume 49L/min (Spray volume at 15 MPa) (15 MPa spray volume× with 32 nozzles) 20L/min (Spray volume at 30 MPa) (at 30 MPa × 16 nozzles)
Power Inverter motor Inverter motor

MJT series

Model MJT2020(C) MJT2035(C) MJT1570 MJT2050
Regular maximum discharge pressure 15MPa 15MPa 15MPa 20MPa
Compatible cleaning liquid Pure water Pure water Pure water Pure water
External dimensions 1600×620×1400mm 1600×620×1400mm 1700×900×1550mm 1700×900×1550mm
Weight 550kg 600kg 1000kg 1000kg
Power 200V 7.5kW 200V 15kW 200V~240V 22kW 200V~240V 22kW
Maximum number of nozzles 20 pcs (612 nozzle) at 10 MPa 30 pcs (612 nozzle) at 10 MPa 60 pcs (612 nozzle) at 10 MPa 34 pcs (612 nozzle) at 15 MPa
Cleaning liquid spray volume 24L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 20 nozzles) 35L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 30 nozzles) 70L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 60 nozzles) 49L/min (Spray volume at 15 MPa) (15 MPa spray volume× with 32 nozzles)
Power Inverter motor Inverter motor Inverter motor Inverter motor

・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.

CONTACT

Please feel free to contact with our division for any questions or concerns you might have about Precision cleaning equipment, Precision spray coating equipment and Piezoelectric Device.