PRODUCTS
Precision cleaning equipment
HPMJ® High pressure micro jet cleaning system
MJ series, Non-metal type
MJ 2800 MJ 2800T
MJ 2800
MJ 2800T
・Designed for a semiconductor production line
・Random injection from each nozzle is possible
| Model | MJ 2800 | MJ 2800T |
|---|---|---|
| Regular maximum discharge pressure | 12MPa | 12MPa |
| Compatible cleaning liquid | Pure water | Pure water |
| External dimensions | 380×450×1300mm | 1200×500×1550mm |
| Weight | 50kg | 200kg |
| Power | 100V～240V | 200V |
| Maximum number of nozzles | 1 pcs (31-612) at 10MPa | 3 pcs (31-612) at 10MPa |
| Cleaning liquid spray volume | 1.15 L/min (Spray volume at 10 MPa) | 3.45l/min (Spray volume at 10 MPa) |
| Power | Compressed air | Compressed air |
・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
・Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.
Pump system of MJ series can be modified to HSPJ system.
MJ series, compact type
MJH 1628 MJH1635
・Non-metallic specifications are also available, This pump can be installed in the existing cleaning line.
| Model | MJH 1628 | MJH 1635 |
|---|---|---|
| Regular maximum discharge pressure | 13MPa | 9MPa |
| Compatible cleaning liquid | Ultra pure water, chemicals | Ultra pure water, chemicals |
| External dimensions | 750×400×500mm | 750×400×500mm |
| Weight | 130kg | 130kg |
| Power | 200V (100V Option) | 200V (100V Option) |
| Maximum number of nozzles | 2 pcs (1.31 L/min at 13 MPa and per nozzle） | 4 pcs (1.1 L/min at 9 MPa and per nozzle） |
| Cleaning liquid spray volume | 2.62L/min (13 MPa spray volume× with 2 nozzles) | 4.4 L/min (9 MPa spray volume× with 4 nozzles) |
| Power | Compressed air | Compressed air |
・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
・Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.
Pump system of MJH series can be modified to HSPJ system.
AF series, Standard type
AF2800 AF5400S(C) AF6200S AF5400SW(C) AF6200SW
AF2800
AF5400S（C）
AF6200S
AF5400SW（C）
AF6200SW
・1st - 4th generation compatibility.
・Random injection from each nozzle is possible
| Model | AF 2800 | AF 5400S（C） | AF 6200S |
|---|---|---|---|
| Regular maximum discharge pressure | 12MPa | 15MPa | 12MPa |
| Compatible cleaning liquid | Pure water | Ultra pure water, chemicals(liquid) | Ultra pure water, chemicals(liquid) |
| External dimensions | 380×450×1300mm | 600×554×1800mm | 600×554×1800mm |
| Weight | 50kg | 200kg | 200kg |
| Power | 100V～240V | 200V (100V Option) | 200V (100V Option) |
| Maximum number of nozzles | 1 pcs (612 nozzle) at 10 MPa | 4 pcc (612 nozzle) at 10 MPa | 6 pcs (612 nozzle) at 10 MPa |
| Cleaning liquid spray volume | 1.15 L/min (Spray volume at 10 MPa) | 4.6L/min (Spray volume at 10 MPa) | 6.9L/min (Spray volume at 10 MPa) |
| Power | Compressed air | Compressed air | Compressed air |
| Model | AF 5400SW（C） | AF 6200SW |
|---|---|---|
| Regular maximum discharge pressure | 15MPa | 12MPa |
| Compatible cleaning liquid | Ultra pure water, chemicals(liquid) | Ultra pure water, chemicals(liquid) |
| External dimensions | 1350×560×1850mm | 1350×560×1850mm |
| Weight | 450kg | 450kg |
| Power | 200V (100V Option) | 200V (100V Option) |
| Maximum number of nozzles | 8 pcs (612 nozzle) at 10 MPa | 12 pcs (612 nozzle) at 10 MPa |
| Cleaning liquid spray volume | 9.2L/min (Spray volume at 10 MPa) | 14L/min (Spray volume at 10 MPa) |
| Power | Compressed air | Compressed air |
・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
・Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.
AF series is also possible to install HSPJ.
MJE, MJT series
MJE 1520(C) MJE 2020(C) MJE 1570 MJE 2050 MJE3030
MJT 2020(C) MJT 2035(C) MJT 1570 MJT 2050
Standard type
MJE 1520（C） MJE 2020（C）
MJT 2020（C） MJT 2035（C）
High flow & volume type
MJE 1570 MJE 2050
MJT 1570 MJT 2050
High impact type
MJE3030
Standard type, high flow & volume type
・ FPD: 4th - 11th generation compatibility, The optimum pressure and flow rate of pump unit can selected according to the glass substrate size. MJE type is made in Japan, Note: Manufactured according to Japanese quality standards.
・MJT type is made in Taiwan. (Cost benefits have also been added.)
High impact type
・Possible to clean at 30 MPa (maximum)
MJE series
| Model | MJE1520（C） | MJE2020（C） | MJE1570 |
|---|---|---|---|
| Regular maximum discharge pressure | 15MPa | 15MPa | 15MPa |
| Compatible cleaning liquid | Pure water | Pure water | Pure water |
| External dimensions | 1600×620×1400mm | 1600×620×1400mm | 1700×900×1550mm |
| Weight | 500kg | 550kg | 1000kg |
| Power | 200V 5.5kW | 200V 7.5kW | 200V～240V 22kW |
| Maximum number of nozzles | 14 pcs (612 nozzle) at 10 MPa | 20 pcs (612 nozzle) at 10 MPa | 60 pcs (612 nozzle) at 10 MPa |
| Cleaning liquid spray volume | 16L/min (Spray volume at 10 MPa) (at 10 MPa spray volume× with 14 nozzles) | 24L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 20 nozzles) | 70L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 60 nozzles) |
| Power | Inverter motor | Inverter motor | Inverter motor |
| Model | MJE2050 | MJE3030 |
|---|---|---|
| Regular maximum discharge pressure | 20MPa | 30MPa |
| Compatible cleaning liquid | Pure water | Pure water |
| External dimensions | 1700×900×1550mm | 1700×900×1550mm |
| Weight | 1000kg | 1000kg |
| Power | 200V～240V 22kW | 200V～240V 22kW |
| Maximum number of nozzles | 34 pcs (612 nozzle) at 15 MPa | 14 pcs (612 nozzle) at 30 MPa |
| Cleaning liquid spray volume | 49L/min (Spray volume at 15 MPa) (15 MPa spray volume× with 32 nozzles) | 20L/min (Spray volume at 30 MPa) (at 30 MPa × 16 nozzles) |
| Power | Inverter motor | Inverter motor |
MJT series
| Model | MJT2020（C） | MJT2035（C） | MJT1570 | MJT2050 |
|---|---|---|---|---|
| Regular maximum discharge pressure | 15MPa | 15MPa | 15MPa | 20MPa |
| Compatible cleaning liquid | Pure water | Pure water | Pure water | Pure water |
| External dimensions | 1600×620×1400mm | 1600×620×1400mm | 1700×900×1550mm | 1700×900×1550mm |
| Weight | 550kg | 600kg | 1000kg | 1000kg |
| Power | 200V 7.5kW | 200V 15kW | 200V～240V 22kW | 200V～240V 22kW |
| Maximum number of nozzles | 20 pcs (612 nozzle) at 10 MPa | 30 pcs (612 nozzle) at 10 MPa | 60 pcs (612 nozzle) at 10 MPa | 34 pcs (612 nozzle) at 15 MPa |
| Cleaning liquid spray volume | 24L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 20 nozzles) | 35L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 30 nozzles) | 70L/min (Spray volume at 10 MPa) (10 MPa spray volume× with 60 nozzles) | 49L/min (Spray volume at 15 MPa) (15 MPa spray volume× with 32 nozzles) |
| Power | Inverter motor | Inverter motor | Inverter motor | Inverter motor |
・Determination of detailed specifications requires verification through cleaning experiments and consultation.
・Manual regulator specifications are also available for pressure control.
・Please feel free to ask with our sales representative.
・In the case of using chemicals and solutions, it must be to verify whether the liquid can be used or not in advance.
・The maximum operating pressure varies according to conditions. Please contact Asahi Sunac NC Division.
Please feel free to contact with our division for any questions or concerns you might have about Precision cleaning equipment, Precision spray coating equipment and sensing technologies.