旭サナック株式会社旭サナック株式会社

EXPERIMENTAL CASE

Precision Cleaning

CMP

CMP

  • Precision Cleaning

It cleans polishing pads of CMP (chemical mechanical polishing) that supports semiconductor devices that continue integration, contributing to pad life and reduction of micro-scratches.

Removal of Processing Burr

Removal of Processing Burr

  • Precision Cleaning

Fine burrs are also occurred on glass products by processing.
If HPMJ is used, only unnecessary burrs can be removed while suppressing damage to the base material.

Rinse After Development

Rinse After Development

  • Precision Cleaning

Color filters in LCD process are made by repeatedly forming, patterning, and peeling off the film. However, if foreign matter remains, the yield rate dose not increase.

Spray Coating

Anti-Fingerprint Film

Anti-Fingerprint Film

  • Precision coating

This is an example of a fingerprint adhesion prevention film that is in increasing demand for touch panels. The film thickness is controlled in the range of a few nm to 100nm.

Carbon Nanotube

Carbon Nanotube

  • Precision coating

This is an example of a transparent conductive film using a carbon nanotube disperse solution. It features an even finish that is possible only because of the spray coating.

Maskless Coat

Maskless Coat

  • Precision coating

This is an example of a patterning coat with Electrostatically Extracted Nozzle and a proposal in order to much for the demand of maskless coating.

PIEZOELECTRIC DEVICE

Coming Soon

We are currently preparing experimental cases of piezoelectric devices.
Please wait for a while.

CONTACT

Please feel free to contact with our division for any questions or concerns you might have about Precision cleaning equipment, Precision spray coating equipment and Piezoelectric Device.